Browsing by Subject "NF3/CF4 permeability selectivity"

Now showing items 1-2 of 2

Membrane facilitated separation of NF3 and CF4

Branken, David Jacobus (North-West University, 2013)

Nitrogen trifluoride (NF3) is frequently used as a source of fluorine in the electronics device manufacturing industry as a dry etchant during plasma assisted etching of silicon wafers, or during the plasma cleaning of ...
Separation of NF3 and CF4 using amorphous glassy perfluoropolymer Teflon AF and Hyflon AD60 membranes

Branken, D.J.; Krieg, H.M.; Lachmann, G.; Le Roux, J.P. (Elsevier, 2014)

In this study, the pure and mixed gas permeabilities of Teflon AF2400, Teflon AF1600 and Hyflon AD60 membranes towards NF3 and CF4 were measured to determine whether membrane gas separation can be applied to purify NF3 of ...